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Institute of Bioelectronic and Molecular Microsystems

 Deposition
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IBMM can deposit a wide range of materials on many different substrates. The main materials and deposition techniques are:

  • Metals by evaporation, sputtering and electroplating (nickel). For details of the Leybold Unipex 350 click here
  • Polymers such as SU8 and other resins by spin coating
  • Photoresists by spin coating
 
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