Leybold Univex 350 Coating System

		School of Electronic Engineering Bangor University
IBMM ::: Micro-engineering & Lab on a Chip \| Laser Micromachining Centre \| Polymer Electronics \| Bio-Sensors
Equipment ::: Excimer Laser \| Femtosecond Laser \| Datron \| EVG \| Heidelberg \| Leybold \| Toyo

Institute of Bioelectronic and Molecular Microsystems

Major features

Electron beam evaporation system
RF/DC magnetron sputterer
Deposition uniformity over 100% of a 125mm dia substrate is +/- 2% for both evaporation and sputtering.
Glow discharge cleaning system

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